Comparison ledger
Semitool 003163-000 SRD, Semitool SAT Ozone Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 003163-000 SRDSemitool | SAT Ozone WaferSemitool |
|---|---|---|
| OEM | Semitool | Semitool |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Semitool 003163-000 SRD | Semitool SAT Ozone Wafer |
| Specifications | ||
| Make | Semitool[1] | — |
| Model | 003163-000[1] | — |
| Equipment type | Spin Rinse Dryer (SRD)[1] | — |
| Asset # | 139375[1] | — |
| Last Confirm Date | September 03, 2025[1] | — |
| Configuration | — | HydrOzone and FluorOzone[2] |
| Specs | — | 24000 W, 208V a.c., 3 Phase[2] |
| Ozone Generator A | — | MKS AX8403L Ozone Generator, Rev. 1B[2] |
| Ozone Destruct Upgrade (never installed) | — | INUSA Heated Catalytic Destruct Module, CAT03-H[2] |
| Process technology | — | HydrOzone and FluorOzone[2] |
| Bowl size | — | Single bowl, 24"[2] |
| DI Water Heater model | — | HCQ24-208-3-002-08[2] |
| DI Water Heater specs | — | 24000 W, 208V a.c., 3 Phase[2] |
| Ozone delivery system model | — | OZOMOD-STI-HO-0[2] |
| Ozone generator | — | MKS AX8403L Ozone Generator, Rev. 1B[2] |
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