Comparison ledger
Semitool 870 S Dual Stack Spin Rinse, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 870 S Dual Stack Spin RinseSemitool | 1000FPYES |
|---|---|---|
| OEM | Semitool | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Semitool 870 | YES 1000FP |
| Specifications | ||
| Phase | 1 Phase[1] | — |
| Configuration | 3 Wire[1] | — |
| Voltage | 220 Vac[1] | — |
| Wires | 3 Wire[1] | — |
| Frequency | 50/60 Hz[1] | — |
| Vintage | 2010[1] | — |
| Make | Semitool[2] | — |
| Model | SRD 870 S[2] | Glen/YES 1000FP[4] |
| Equipment type | Dual Stack Spin Rinse Dryer (SRD)[2] | — |
| Power | 1 Phase, 3 Wire, 220 Vac, 50/60 Hz[1] | — |
| Wafer capacity | Up to 6/150[3] | — |
| System type | — | Plasma cleaning system[4] |
| Line | — | R-Series Plasma Cleaning Systems (Glen Technologies)[4] |
| Designed use | — | Designed to accept a range of shelf sizes[4] |
| Application focus | — | Changing needs of the flat panel industry[4] |
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