Comparison ledger
Semitool EO 222 SR, Tegal 110, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EO 222 SRSemitool | 110Tegal |
|---|---|---|
| OEM | Semitool | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Semitool EO 222 SR | Tegal 110 |
| Cited variants | — |
|
| Specifications | ||
| Phase | 3 Phase[2] | — |
| Configuration | 5 Wire[3] | — |
| Voltage | 208 Vac[2] | — |
| Wire configuration | 5 Wire[2] | — |
| model | — | 110 SE[1] |
| application focus | — | process development applications[1] |
| process capability | — | deep silicon plasma etching[1] |
| capabilities | — | very high aspect ratio trench etch and profile control[1] |
| configuration | — | multiple configurations with minimum technical intervention[1] |
| System type | — | plasma etch system[4] |
| Supported components | — | MEMS and 3D-IC components[1] |
| Control capability | — | very high aspect ratio trench etch and profile control[4] |
| Physical description | — | compact[1] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →