Comparison ledger
Sumitomo SHX Ion, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SHX IonSumitomo | 160 XP IonVarian |
|---|---|---|
| OEM | Sumitomo | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Sumitomo SHX Ion | Varian 160 XP Ion |
| Specifications | ||
| Configuration | With:[1] | 150mm High Current IMP[4] |
| Configuration & options | Chiller[2] | — |
| Vacuum & pumping | Trans CRYO-Compressor ×2[2] | — |
| Included equipment | Chiller; Trans CRYO-Compressor ×2[1] | — |
| Manufacturer | Sumitomo[1] | — |
| Model | SHX[1] | 160 XP Ion[5] |
| Category | Ion Implantation[3] | Ion Implantation[4] |
| OEM | — | Varian[5] |
| Tool type | — | ion implanter[4] |
Plan your fab
Building a Ion Implantation process? Get a complete equipment list.
Open the fab equipment planner →