Comparison ledger
Tegal 110, Tokyo Electron Act 8 Metal, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 110Tegal | Act 8 MetalTokyo Electron |
|---|---|---|
| OEM | Tegal | Tokyo Electron |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Tegal 110 | Tokyo Electron Act |
| Cited variants |
| — |
| Specifications | ||
| model | 110 SE[1] | — |
| application focus | process development applications[1] | — |
| process capability | deep silicon plasma etching[1] | — |
| capabilities | very high aspect ratio trench etch and profile control[1] | — |
| configuration | multiple configurations with minimum technical intervention[1] | — |
| System type | plasma etch system[2] | — |
| Supported components | MEMS and 3D-IC components[1] | — |
| Control capability | very high aspect ratio trench etch and profile control[2] | — |
| Physical description | compact[1] | — |
| Configuration | — | 2 chamber DPS Metal[3] |
| Gas | — | PGMEA, HMDS, TMAH[3] |
| OS | — | Lynx[3] |
| Missing | — | TH unit sight glas, thermocon circulator, spin motor driver[3] |
| DPS Metal chambers | — | 2[3] |
| ASP+ chambers | — | 2[3] |
| Orienter/degas modules | — | 2[3] |
| Operating system | — | Lynx[3] |
| Process gases | — | PGMEA, HMDS, TMAH[3] |
| Manufacturer | — | Tokyo Electron[3] |
| Model | — | Act 8 Metal[3] |
| Category | — | Etch[4] |
| Tool type | — | metal etcher[3] |
| Gas / chemistry | — | PGMEA, HMDS, TMAH[3] |
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