Comparison ledger
Veeco NT 3300 SU 2D 3D Profiler, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1000PYES | |
|---|---|---|
| OEM | Veeco | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Acquisition |
| Control system | — | — |
| Generation | — | — |
| Family | Veeco NT 3300 | YES 1000P |
| Specifications | ||
| Configuration | 200mm Stage with Encoders[1] | Parallel plate[4] |
| Make | Veeco / Wyko[1] | — |
| Model | NT 3300 SU[1] | 1000P[3] |
| Wafer Sizes | 6, 8 inch[1] | — |
| Stage | 200mm stage with encoders[1] | — |
| Motorized XYZ | Yes[1] | — |
| Motorized Turret | Yes[1] | — |
| Auto Focus | Yes[1] | — |
| Stitching | Yes[1] | — |
| Full Automation Capability | Yes[1] | — |
| Resolution | Sub-nanometer[1] | — |
| Z-range | Large Z-range[1] | — |
| Characterization | 2D and 3D characterization and visualization[1] | — |
| Gauge-capable | Yes[1] | — |
| Range Automation | Yes[1] | — |
| Measure Optics | Measure Optics[2] | — |
| Wafer sizes | 6 inch, 8 inch[1] | — |
| Motion | Motorized XYZ[1] | — |
| Turret | Motorized turret[1] | — |
| Focus | Auto focus[1] | — |
| Automation | Full automation capability[1] | — |
| System type | — | Plasma cleaning system[3] |
| Shelf configuration | — | Four 16 x 16 inch shelves[3] |
| Total capacity | — | 1024 square inches[3] |
| Control system | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[3] |
| Number of shelves | — | 4[3] |
| Shelf size | — | 16 x 16 inches[3] |
| Power | — | 1000 W[4] |
| Operation modes | — | Active, RIE, Downstream[3] |
| Sample size range | — | From smallest semiconductor chip to large flat panels[3] |
| Type | — | Plasma cleaning system[3] |
| Shelves | — | Four 16 x 16 inch shelves[3] |
| Control | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[3] |
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