Waferpedia

Tool family

Advanced Energy RFX

Advanced Energy2 entries
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Models in this family

  1. RFX 2500
  2. RFX 600

    Cited variants

    DesignationGenerationVintageChangesSource
    RFX 600 with ATX 600——Listed as "With ATX 600".Equipment inventory listing[1]
    RFX 600 / 5002-000-B——Listed with model number 5002-000-B.Equipment inventory listing[2]

All entries

  1. RFX 2500Advanced Energy
    2 specs
  2. RFX 600Advanced Energy
    3 specs

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing