Waferpedia

Tool family

Asyst Versaport 2200

Asyst2 entries
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Models in this family

  1. Versaport 2200 Indexer
  2. Versaport 2200 SMIF

All entries

  1. Versaport 2200 IndexerAsyst
    Wafer2nd EPROM has the firmware for wafer cassettes (in spare)
    8 specs
  2. Versaport 2200 SMIFAsyst
    1 spec