Waferpedia

Tool family

Brooks ABM ATM

Brooks2 entries
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Models in this family

  1. ABM ATM 405 Atmospheric Wafer Handling Robot

    The Brooks / PRI ABM / ATM 405 is an atmospheric wafer handling robot with a single-arm configuration.

  2. ABM ATM 407 B Atmospheric Wafer Handling Robot

    The Brooks / PRI ABM / ATM 407 B is an atmospheric wafer handling robot described as a single-arm system.

All entries

  1. ABM ATM 405 Atmospheric Wafer Handling RobotBrooks

    The Brooks / PRI ABM / ATM 405 is an atmospheric wafer handling robot with a single-arm configuration.

    CategoryAssembly / SMT
    1 spec
  2. ABM ATM 407 B Atmospheric Wafer Handling RobotBrooks

    The Brooks / PRI ABM / ATM 407 B is an atmospheric wafer handling robot described as a single-arm system.

    1 spec