Waferpedia

Tool family

Espec HRS-357HS-20

Espec1 entry

The Espec HRS-357HS-20 is a rapid-rate thermal cycle chamber with a temperature and humidity range of −70℃ to +180℃ and 20%rh to 98%rh. The Espec HRS-357HS-20 has a temperature change rate of 20℃/min and interior dimensions of 700×850×600 mm.

Models in this family

  1. The Espec HRS-357HS-20 is a rapid-rate thermal cycle chamber with a temperature and humidity range of −70℃ to +180℃ and 20%rh to 98%rh. The Espec HRS-357HS-20 has a temperature change rate of 20℃/min and interior dimensions of 700×850×600 mm.