Waferpedia

Tool family

Espec HRS-600HS-25

Espec1 entry

The Espec HRS-600HS-25 is a rapid-rate thermal cycle chamber with a temperature and humidity range of −70℃ to +180℃ and 20%rh to 98%rh. The Espec HRS-600HS-25 has a temperature change rate of 25℃/min.

Models in this family

  1. The Espec HRS-600HS-25 is a rapid-rate thermal cycle chamber with a temperature and humidity range of −70℃ to +180℃ and 20%rh to 98%rh. The Espec HRS-600HS-25 has a temperature change rate of 25℃/min.