Waferpedia

Tool family

Kawasaki 3 NX 540 B A 302 Atmospheric Wafer Robot

Kawasaki1 entry
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Models in this family

  1. 3 NX 540 B A 302 Atmospheric Wafer Robot

    The Kawasaki 3 NX 540 B A 302 is an atmospheric wafer robot described as compatible with AMAT Producer.