Waferpedia

Tool family

Laurell EDC-650-15 B

Laurell EDC-650-15 B is an EDC System 650-series spin coater with a maximum substrate size of 300mm (9" x 9").

Models in this family

  1. Laurell EDC-650-15 B is an EDC System 650-series spin coater with a maximum substrate size of 300mm (9" x 9").