Waferpedia

Tool family

Laurell EDC-650-23B

The Laurell EDC-650-23B is an EDC System spin coater from the 650 Series, supporting substrates up to 150mm diameter and spin speeds up to 12,000 rpm.

Models in this family

  1. The Laurell EDC-650-23B is an EDC System spin coater from the 650 Series, supporting substrates up to 150mm diameter and spin speeds up to 12,000 rpm.

    Cited variants

    DesignationGenerationVintageChangesSource
    EDC-650-8B——Max substrate size Ø200mm (7" × 7")laurell.com[1]
    EDC-650-15B——Max substrate size Ø300mm (9" × 9")laurell.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]laurell.comlaurell.com