Waferpedia

Tool family

MKS 631F

MKS1 entry

The MKS 631F is a heated absolute capacitance manometer with a full-scale range of 1 to 1000 Torr and 0.50% accuracy of reading.

Models in this family

  1. The MKS 631F is a heated absolute capacitance manometer with a full-scale range of 1 to 1000 Torr and 0.50% accuracy of reading.