Waferpedia

Tool family

MKS Edge

MKS3 entries
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Models in this family

  1. Edge 210 R 40 A-G 12

    The MKS Edge 210 R 40 A-G 12 is an RF generator rated at 400 kHz and 12 kW.

  2. Edge 300 R 40 A E 11 RevE
  3. Edge 3013 A E 70

    The MKS Edge 3013 A E 70 is an RF generator described with 50/60 Hz, 25 A, and 200–208 V specifications.

All entries

  1. Edge 210 R 40 A-G 12MKS

    The MKS Edge 210 R 40 A-G 12 is an RF generator rated at 400 kHz and 12 kW.

    1 spec
  2. Edge 300 R 40 A E 11 RevEMKS
    1 spec
  3. Edge 3013 A E 70MKS

    The MKS Edge 3013 A E 70 is an RF generator described with 50/60 Hz, 25 A, and 200–208 V specifications.

    3 specs