Waferpedia

Tool family

MKS Edge

MKS3 entries
Email

Models in this family

  1. The MKS Edge 210 R 40 A-G 12 is an RF generator rated at 400 kHz and 12 kW.

  2. The MKS Edge 300 R 40 A E 11 RevE is an RF generator in the Lab & Support Equipment category.

  3. The MKS Edge 3013 A E 70 is an RF generator described with 50/60 Hz, 25 A, and 200–208 V specifications.

All entries

  1. Edge 210 R 40 A-G 12MKS

    The MKS Edge 210 R 40 A-G 12 is an RF generator rated at 400 kHz and 12 kW.

    CategoryLab & Support Equipment
    3 specs
  2. Edge 300 R 40 A E 11 RevEMKS

    The MKS Edge 300 R 40 A E 11 RevE is an RF generator in the Lab & Support Equipment category.

    CategoryLab & Support Equipment
    5 specs
  3. Edge 3013 A E 70MKS

    The MKS Edge 3013 A E 70 is an RF generator described with 50/60 Hz, 25 A, and 200–208 V specifications.

    CategoryLab & Support Equipment
    7 specs