Tool family
The Pfeiffer ATH1603M is identified as a turbo pump on the chamber pumping line of an EVA 451 evaporator system.
The Pfeiffer ATH1603M is a magnetically levitated turbomolecular pump used for high vacuum applications.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Y2662100 | — | — | — | lagerwerk.com[1] |
| Y2522100 | — | — | — | idealvac.com[2] |
| Y25231L0 | — | — | — | idealvac.com[3] |
| TE5231B1 | — | — | — | semiconductorspares.com[4] |
| ATH1603M (DN250) | — | — | Inlet flange DN250 ISO-F with protective grille, water-cooled, magnetic bearing | lagerwerk.com[1] |
| ATH1603M (DN200) with MAGPOWER controller | — | — | Inlet flange DN200 ISO-F, includes MAGPOWER controller (type 120917 Ed.A), water cooling, magnetic bearing | lagerwerk.com[5] |