Waferpedia

Tool family

Pfeiffer HiPace

Pfeiffer2 entries
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Models in this family

  1. HiPace 300 Turbomolecular Vacuum
  2. HiPace 800 + TC 400 Turbo

    The Pfeiffer HiPace 800 + TC 400 is a turbo pump with a TC 400 controller.

All entries

  1. HiPace 300 Turbomolecular VacuumPfeiffer
    2 specs
  2. HiPace 800 + TC 400 TurboPfeiffer

    The Pfeiffer HiPace 800 + TC 400 is a turbo pump with a TC 400 controller.

    3 specs