Waferpedia

Tool family

Pfeiffer TMH

Pfeiffer2 entries
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Models in this family

  1. TMH 071 P Vacuum
  2. TMH 1001 SG Turbo

    The Pfeiffer TMH 1001 SG is a turbo pump described with DN 200 ISO-K, 3P, TL011 oil, S(N2) of 880 l/s, and a mass of 40 kg.

All entries

  1. TMH 071 P VacuumPfeiffer
    3 specs
  2. TMH 1001 SG TurboPfeiffer

    The Pfeiffer TMH 1001 SG is a turbo pump described with DN 200 ISO-K, 3P, TL011 oil, S(N2) of 880 l/s, and a mass of 40 kg.

    4 specs