Waferpedia

Tool family

Pfeiffer TMU 064

Pfeiffer2 entries
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Models in this family

  1. TMU 064 P Turbo
  2. TMU 064 Turbomolecular

All entries

  1. TMU 064 P TurboPfeiffer
    6 specs
  2. TMU 064 TurbomolecularPfeiffer
    2 specs