Waferpedia

Tool family

Pfeiffer TPH

Pfeiffer2 entries
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Models in this family

  1. TPH 10 HU Turbo
  2. TPH 170 Turbomolecular Vacuum

All entries

  1. TPH 10 HU TurboPfeiffer
    1 spec
  2. TPH 170 Turbomolecular VacuumPfeiffer
    4 specs