Waferpedia

Tool family

Pfeiffer TPU

Pfeiffer5 entries
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Models in this family

  1. TPU 050 Turbomolecular Vacuum
  2. TPU 060 Turbomolecular Vacuum

    The Pfeiffer TPU 060 is a turbomolecular vacuum pump.

  3. TPU 100 High Vacuum Turbo

    The Pfeiffer TPU 100 is a high vacuum turbo pump with a pumping speed of 110 l/s and an oil filling of 2 x 6 cm3.

  4. TPU 170 Turbomolecular
  5. TPU 510 Turbomolecular Vacuum

All entries

  1. TPU 050 Turbomolecular VacuumPfeiffer
    3 specs
  2. TPU 060 Turbomolecular VacuumPfeiffer

    The Pfeiffer TPU 060 is a turbomolecular vacuum pump.

    1 spec
  3. TPU 100 High Vacuum TurboPfeiffer

    The Pfeiffer TPU 100 is a high vacuum turbo pump with a pumping speed of 110 l/s and an oil filling of 2 x 6 cm3.

    2 specs
  4. TPU 170 TurbomolecularPfeiffer
    2 specs
  5. TPU 510 Turbomolecular VacuumPfeiffer
    3 specs