Waferpedia

Tool family

Rorze RR 717 L 1521 3 A 6 211 1 Atmospheric Wafer Handling Robot

Rorze1 entry

Models in this family

  1. Rorze RR 717 L 1521 3 A 6 211 1 is an atmospheric wafer handling robot configured for 12-inch wafers and described as a dual-arm unit.