Waferpedia

Tool family

SMC INR

SMC3 entries
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Models in this family

  1. INR 244 633 A
  2. INR 497-049 Thermo Chiller

    SMC INR 497-049 is a thermo chiller described as a dual-channel unit with 10 kW capacity and a DI water generator.

  3. INR 498 007 B Chiller

    The SMC INR 498 007 B is a triple-loop chiller rated for 3 phase, 3 wire + G line, 50/60 Hz.

All entries

  1. INR 244 633 ASMC
    1 spec
  2. INR 497-049 Thermo ChillerSMC

    SMC INR 497-049 is a thermo chiller described as a dual-channel unit with 10 kW capacity and a DI water generator.

    3 specs
  3. INR 498 007 B ChillerSMC

    The SMC INR 498 007 B is a triple-loop chiller rated for 3 phase, 3 wire + G line, 50/60 Hz.

    4 specs