Waferpedia

Tool family

Wyko SP3000

The Wyko SP3000 is an automated, non-contact 3D optical profiler for large format samples and in-line process monitoring of flip-chip packaging.

Models in this family

  1. The Wyko SP3000 is an automated, non-contact 3D optical profiler for large format samples and in-line process monitoring of flip-chip packaging.

    Cited variants

    DesignationGenerationVintageChangesSource
    SP3200 Advanced Packaging Profiling SystemDescribed as an advanced packaging profiling system and, compared with the SP3000, presented as a dual-process-control profiler that functions as both a surface metrology tool and a defect inspection tool.web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org