Waferpedia

Tool family

YES CV108

The YES CV108 is a single-wafer downstream plasma stripper/descummer for removing photoresist, polyimide, and B.C.B. coatings.

Models in this family

  1. The YES CV108 is a single-wafer downstream plasma stripper/descummer for removing photoresist, polyimide, and B.C.B. coatings.