Waferpedia

Tool family

Zygo 3D

ZYGO 3D is an optical profiler line described as a noncontact, accurate, repeatable surface metrology system.

Models in this family

  1. ZYGO 3D is an optical profiler line described as a noncontact, accurate, repeatable surface metrology system.

    Cited variants

    DesignationGenerationVintageChangesSource
    Z3D-7000web.archive.org[1]
    NewView 600sweb.archive.org[1]
    NewView 6000 Seriesweb.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org