Waferpedia

sputter target

Materials

The consumable slab of source material eroded during sputter deposition. Target purity directly sets film purity, and targets are engineered — bonding, grain structure, shape — for uniform erosion; they are replaced on a preventive-maintenance schedule as they wear.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Sputter depositionWikipediaen.wikipedia.org