Waferpedia

Manufacturer

ENI

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26 entries

  1. RFGENI
  2. Nova 25 AENI
  3. 3200 L RF Power AmplifierENI
  4. 3100 LA RF AmplifierENI
  5. AZX 72 RF MatcherENI
  6. GHWENI
  7. NovaENI
  8. OEM SeriesENI
  9. AX SeriesENI
  10. RF SeriesENI
  11. SpectrumENI
  12. HPVENI

    The ENI HPV is an RF generator.

  13. Spectrum 11002 00ENI
  14. RFC 6ENI
  15. OEM 12 BENI
  16. DOFBC 2 078ENI
  17. DCG 200 Z S 00ENI
  18. DCG 200 Z OptimaENI
  19. OEM 2000 02ENI
  20. 560 AENI
  21. DSG 200ENI
  22. 3100 L RF Power MeterENI
  23. MWH 100ENI
  24. DCG 100ENI
    CategoryDeposition
  25. RPG 50ENI

    The ENI RPG 50 is a DC plasma generator described as a 3-phase unit operating at 50/60 Hz and 200-208V with 4 wire plus ground.

    CategoryEtch
  26. GMW 25ENI