The index

Browse by dimension

Navigate the encyclopedia by the dimensions that matter: who made a tool, what it does, what it processes, and where it is in its life.

16,960 cited entries · 4 axes

01Metrology & Inspection1166 02Test & Probe920 03Etch516 04Packaging & Bonding478 05Deposition451 06Lithography419 07Thermal / Diffusion393 08Lab & Support Equipment367 09Precision Optics274 10Wet Processing / Clean227 11Dicing & Grinding219 12Assembly / SMT183 13CMP159 14Ion Implantation150 15Resist Processing75 16Spin coater12 17oscilloscope10 18Insert carrier / lapping carrier5 19insert carrier / lapping carrier4 20Ophthalmic coating system3 21Passenger locomotive3 22dot matrix printer3 23Recirculating chiller3 24Micropositioner2 25diesel-electric passenger locomotive2 26Spin coater / spin processor2 27E-gun2 28CT system2 29machine vision-based CMM2 30Electrical measurement2 31UV intensity meter2 32Single Wafer Resist Stripper2 33Machine vision-based CMM2 34Reflectometry2 35Dual function VB/VP & image reversal system2 36Measurement2 37Film Thickness Measurement2 38electron beam source2 39thin-film thickness measurement instrument2 40Spin Rinser/Dryer2 41spin coater2 42Substrate holder2 43machine vision system2 44Spin processor1 45Production MBE system1 46Thermal Process1 47Wet Station1 48Tabletop vacuum curing system1 49Hall measurement system1 50Characterization1 51horizontal vacuum low-pressure steam sterilizer1 52general-purpose machine vision system1 53Nano and Micro Fabrication1 54Automated Thickness Mapping Systems1 55Dimpler1 56MBE Sources1 57recirculating chiller1 58Vacuum coating system1 59Microwave Downstream Plasma Asher1 60Passenger locomotives1 61Photoresist spin station1 62Barrel type photoresist asher1 63Ion mill1 6480-column dot matrix printer1 65Special tool1 66Film thickness measurement system1 67Zwangskonvektionsofen1 68Spinner1 69Electrical measurement instrument1 70mini-printer1 71Thin-Film/Material Analysis1 72thickness measurement instrument1 73Thin-film thickness measurement system1 74Film thickness mapping tool1 75Plasma Strip/Descum System1 76Coating component1 77Fully Automated Ophthalmic Coating System1 78Spectroscopic ellipsometer1 79Microtome1 80Connectivity software1 81Anti-reflection coating measurement system1 82Surface profiler1 83special tool1 84printer1 85Spin Coater1 86advanced cluster platform1 87Insert carrier1 88Critical point dryer1 89laboratory C-SAM instrument1 90simultaneous reflectance and transmittance measurement instrument1 91thin-film thickness measurement system1 92low temperature plasma activation system1 93laser welder1 94spin controller1 95Pattern Generator1 96Ultrasonic Microstructural Analyzer1 97Thermal Processing1 98Parylene thickness measurement system1 99gas distribution system / pressure controller1 100characterization equipment1 101Single-wafer downstream plasma stripper/descummer1 102Automated polyimide curing tool1 103Film thickness mapping instrument1 104inkjet cartridge1 105ellipsometry1 106Mini wet station1 107computer1 108thermal probing system1 109connector1 110insert carrier1 111terrestrial network management system1 112Digital signal processing board1 113Resistivity system1 114Assembly Work Cell1 115Wet chemistry1 116Automatic Coating and Developing Tool1 117Operation and Maintenance1 118Profiling system1 119throttle valve1 120Solar Cell Simulator1 121Film thickness mapping tool for patterned wafers1 122Spinner/Hotplate1 123Tape & Reel equipment1 124Characterization equipment1 125MPT Application1 126Spinner controller1 127minicomputer1 128Ion source1 129Conductive epoxy dispenser1 130Ellipsometer1 131Network analyzer1 132Nanoengineering EBL tool1 133Surface Profiler1 134cluster platform1 135Film thickness mapping system for patterned wafers1 136machine vision-based coordinate-measuring machine1 137In-line thickness measurement system1 138Contact angle goniometer1 139Backend1 1401st Stage / Carcass Drums1 141DRIE1 142Parylene coater1 143PCB prototyping machine1 144E-gun source1 145Plasma strip/descum system1 146systems1 147photoresist spin station1 148RFID chip attach equipment1 149SMIF / isolation / wafer management system1 150Semiconductor1 151amino acid analyzer1 152Accessories1 153Ultraviolet decontamination chamber1 154film-measurement instrument1 155Electron beam power supply1 156NMR system1 157Insert carriers / lapping carriers1 158Develop spinner1 159film thickness mapping instrument1 160Sample coater for scanning electron imaging1 161Infrarot-Ofentrockner / Brennofen1 162Interconnect profiling system1 163machine vision-based dimensional measurement system1 164Vapor Prime / Image Reversal / Silylation system1 165Hardcoat Thickness Measurement Instrument1

166Applied Materials1522 167KLA580 168Agilent356 169Lam Research312 170Nikon305 171Tokyo Electron292 172Hitachi223 173SCREEN211 174Keysight184 175SUSS MicroTec179 176Tektronix178 177Thermo Fisher176 178Advantest169 179Teradyne152 180Disco144 181Onto Innovation124 182ASM122 183Olympus106 184Edwards105 185Axcelis101 186Canon100 187YES98 188Pfeiffer98 189ASML97 190MKS96 191Semitool91 192Accretech88 193Bruker84 194Advanced Energy77 195Veeco77 196Varian75 197West Bond71 198Kulicke & Soffa70 199Oxford Instruments67 200Plasma-Therm67 201Brooks67 202EV Group66 203Strasbaugh66 204Panasonic66 205JDSU66 206Blue M63 207Ulvac62 208Perkin Elmer62 209Esec62 210Zeiss60 211Nordson59 212ESPEC55 213Seiko Epson53 214Juki48 215Laurell47 216Zygo46 217Leybold45 218Tegal45 219Electroglas45 220Aixtron43 221CHA42 222Temescal39 223Mitutoyo39 224LTX-Credence39 225SVG37 226Heller37 227Fuji32 228Thermotron31 229Filmetrics31 230Newport31 231Takatori30 232ESI29 233Denton Vacuum29 234Signatone27 235Nitto27 236Branson26 237OAI26 238MPI26 239Cascade Microtech26 240ENI26 241PR Hoffman25 242Besi25 243Lapmaster24 244Koh Young24 245Multitest24 246Espec24 247Sumitomo24 248SPTS24 249Mattson23 250Shinkawa23 251Cohu23 252Wyko23 253Hesse & Knipps22 254Asyst22 255Neslab22 256CEE22 257Ultratech21 258Samsung21 259Despatch21 260Chroma20 261Speedline20 262SMC20 263Logitech20 264Rigaku20 265Dek19 266Siemens19 267Lindberg19 268Yamaha18 269DAIHEN18 270Tenney18 271Palomar18 272Ismeca17 273Genmark17 274STS16 275AJA16 276Micromanipulator16 277Meyer Burger16 278Buehler16 279BTU16 280Rorze16 281Optorun16 282MRSI15 283Leica15 284Micro-Vu15 285Camtek15 286CyberOptics14 287Malvern Panalytical14 288Vitronics13 289Ultron13 290Mydata13 291Hanwha13 292Nissin13 293Nutek13 294JEOL13 295GCA12 296Sonix12 297View Engineering12 298Yaskawa12 299SSEC11 300Headway10 301ADT10 302SCIEX10 303Trumpf9 304Test Research9 305DEK9 306Ontrak9 307Finetech9 308Comdel9 309Assembleon8 310Coherent8 311Blanchard8 312Eagle8 313FormFactor8 314OGP8 315Thermco8 316Sonoscan8 317LPKF7 318Karl Suss7 319Towa7 320Electrovert7 321Glenbrook7 322RECIF6 323Semics6 324MPM6 325Spectra-Physics6 326Wafab6 327Tystar6 328Maury Microwave6 329Fico6 330Brewer Science6 331Exatron6 332YXLON6 333Nova6 334F&K Delvotec6 335Spea6 336Rasco5 337Mellen5 338Woollam5 339ERSA5 340ADE5 341Nanospec5 342Struers5 343Balzers5 344Kawasaki5 345Santa Clara Plastics4 346Melles Griot4 347Rame Hart4 348Solitec4 349Gaertner4 350TechWing4 351Kensington4 352Mahr4 353Quintel4 354Seren4 355Nanometrics4 356Allied High Tech4 357Raith4 358Orbotech4 359Dektak4 360Novellus4 361MyData4 362ABM4 363Heidelberg Instruments3 364Trion3 365Kurt Lesker3 366VAT3 367LEO3 368Rudolph3 369Rofin3 370TEGAL3 371Hontech3 372Staubli3 373Riber3 374Universal Instruments3 375IPG3 376Yxlon3 377ADVANTEST2 378Datacon2 379August2 380Rehm2 381Alcatel2 382Dynapace2 383Dage2 384GigaMat2 385Angstrom Engineering2 386Optimum2 387Audio DEV2 388Proton2 389PVA TePla2 390Parmi2 391HITACHI2 392Specialty Coating Systems2 393LAM RESEARCH2 394Chemical Safety Technology2 395GKG2 396MATTSON1 397NIKON1 398Hamatech1 399Epilog1 400Tri1 401FEI1 402Delta Design1 403MicroCraft1 404Nanoscribe1 405Aeroflex1 406CAMTEK1 407Therma-Wave1 408South Bay Technology1 409Eaton1 410HONTECH1 411Orient Service1 412Thermawave1 413DISCO1 414CANON1 415Keyence1 416J.A. Woollam1 417Tescan1 418AccoTest1 419Simplimatic1 420Hybond1 421Asahi1 422Bruce1 423Universal Laser1 424Toho Technology1 425FitTech1 426memsstar1 427Cymer1 428Tousimis1 429RORZE1 430STEAG1

431200mm67 432150mm50 433100mm41 434300mm39 4354"36 4366"22 4378"17 438Wafer Equipment15 4398-inch9 4403"9 4412"6 442Manual wafer load substrate bonder4 443Single wafer3 444Wafer Loader3 44576mm3 446Wafer Handler3 44712"3 44850mm2 449up to Φ8”2 4506 in2 4516 in.2 45275 mm, 100 mm, 125 mm, and 150 mm diameter wafers; 4-inch square wafers2 453Wafer Handling2 4543 in, 4 in, 5 in, 6 in, 8 in, 12 in2 455Wafer ID Reader2 4566-inch diameter stage2 457Wafer table with wafer expander for 8”2 458Wafer Mapping2 45910 in.2 460Single Foup Wafer Loader (Right)2 46175 mm to 100 mm2 46275 mm to 150 mm round substrates; rectangular substrates from 100 mm to 125 mm on a side2 46325 Wafer Slot Cassette2 464Batch Solvent Processor for Wafer Cleaning2 4655"2 466For Wafer Centering Device2 4678 in. wafers2 468up to 6-inch wafers2 4696-8 in. (Auto Detect)1 4706-inch capability1 4716-inch diameter microchamber and thermal chuck1 4726-inch wafers1 4736” wafer loading through the loadlock is possible1 4747 inches in diameter usable area1 47575 mm to 150 mm round substrates; square and rectangular substrates1 47675mm to 200mm wafers1 4778 in (190-1600 nm)1 4788-inch wafers1 479A 1KW lamp for wafer heating1 480Auto Alignment System (Needle Tip, Wafer)1 481Auto loader (EFEM), wafer transfer system, load lock chamber, process chamber, operation panel.1 482Automated Wafer Handler1 483Automatic Beam Alignment on wafer1 484Bare Wafer Inspection Station1 485Bare wafer inspection station1 486Below Wafer1 487Brooks TM (Transfer Module) with four Wafer Manual Load Lock1 488Can produce wafer as-is1 489Capable of thermo compression, fusion or anodic wafer bonding1 490Capable of working with wafer masks up to 9″ x 9″1 491Cassette to Cassette Single Wafer Etcher1 492Ceramic high stability wafer chuck1 493Continuous clampable wafer table for dry WSs: Absent1 494DBM 2407 V 2 Wafer Handling Robot1 495Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, Notch1 496Does not have the exposure optics. It is just a manual aligner for wafer bonding1 497Dual cassette wafer handling1 498Entegris FA 200-85 MT 7902 Wafer Cassette1 499For nondestructive wafer analysis1 500Franklin Mechanical wafer loader1 501Front & Backside Wafer ID Reader (RFID)1 502Full Wafer Dual Beam1 503Grip Ring Holder or Wafer frame1 504High precision micrometer for wafer alignment adjustment1 505Ideal for photovoltaic, wafer, and coating characterization (solar cell reflectance and antireflection studies)1 506In Air Wafer Handling:1 507In-Vacuum Wafer Robotic Transfer System1 508In-process wafer thickness measurement on Z1 & Z21 509Includes PSC Calibration Wafer1 510Includes thin wafer handling kit1 511Inspection/Wafer Visual /6in.1 512Integrated Wafer Cleaning System with Atomizing Nozzle1 513Interface Unit (IRA) for Canon FPA-3000 i5 stepper including one multi-buffer unit and Wafer edge exposure (WEE)1 514Lam 9600 FEFG, Lam Research, Offline , Metal Etcher,1 515Laser Wafer Mapping1 516Linear Wafer Tracks1 517Load port-TDK with wafer mapping and RFID reader1 518Manual wafer loading1 519Manual wafer lock1 520Mask / Wafer Handling:1 521Mini-Environment Wafer Loading Module (EFEM)1 522Mk1 3 KW lamp (provide wafer heating)1 523Motorized swivel arm Wafer loading trays required for desired wafer size ic devices.1 524Multiple IOSS Wafer ID Reader1 525Multiple wafer disks1 526Nicolet, Scientific, Thermo 6700 FT-IR SPECTROMETER, MAP300 and Wafer Stage1 527No wafer handler1 528No wafer top-side bar reading1 529One wafer manual loader1 530Only one wafer size at a time1 531Parallel wafer flow processing software option (simultaneous coat & develop)1 532Patented Wafer Chuck or Holding Device1 533Platen3 - Wafer Buff1 534Quartz Wafer1 535Robot Unit– automated wafer handling between cassettes and chuck tables.1 536Robot Wafer handling1 537Robotic Wafer Handler:1 538STEAG / MATTSON / AST SHS 2800 is a RTP / RTA / EPI system. The SHS 2800 can produce wafer size of 6” and 8” Documents1 539Samples ranging in size from 10mm to 150mm1 540Si Wafer1 541Silicon and Silicon on Insulator (SOI) wafers1 542Single FOUP Wafer Loader (Right)1 543Single Wafer (LOP)1 544Single Wafer Loader1 545Single Wafer SiC Substrate1 546Single-Wafer Chamber for Deep Silicon Etch1 547Single-pincette shared wafer transfer with centering guides1 548Standard PDP 11/93 Computer & Silicon Carbide Wafer Loader Type 1 Conversion on it1 549Supports non-standard wafer types (Mems, Taiko, Thin)1 550Taiko wafer adapter1 551The direction of wafer flow is right to left1 552Three simultaneous color defect review methods: on-the-fly, high resolution, whole wafer1 553Tool scans a wafer in a meander path1 554Universal wafer handler1 555Up to 50 wafers per batch (two 25-wafer cassettes)1 556Up to 6-inch wafers1 557Up to 8-inch wafers1 558Wafer Alignment:1 559Wafer Backside Rinse1 560Wafer Coating System Configuration1 561Wafer Cooling1 562Wafer Developing System Configuration1 563Wafer Hander:1 564Wafer I Cassette Handling1 565Wafer I.D Reading1 566Wafer Loader Blade Control PCB1 567Wafer Notch Visual Monitoring Alignment Option1 568Wafer Orienter1 569Wafer Position Detect1 570Wafer Profiler Kit1 571Wafer Ring Holder,1 572Wafer Stage1 573Wafer Stage Motor & Drive1 574Wafer System:1 575Wafer Table1 576Wafer Thickness 350μm ~ 1100μm1 577Wafer Thickness Measurement1 578Wafer Tilt Monitor1 579Wafer Transfer1 580Wafer Transfer Machine1 581Wafer Transfer Robot x 1 (1 Block System)1 582Wafer Transfer Robot:1 583Wafer Transfer System1 584Wafer X-Axis is out of order1 585Wafer auto load/unload1 586Wafer bonding at pressures 5e-5 to 3e-3 Torr and 50*C to 550*C1 587Wafer chambers1 588Wafer chuck (1)1 589Wafer chuck and standard sample holder1 590Wafer end effector1 591Wafer handler1 592Wafer imaging ability; entire surface of 8” or 12” wafer1 593Wafer kit sensor1 594Wafer loader1 595Wafer loss sensor1 596Wafer on Gripper Sensor1 597Wafer orientor1 598Wafer processing modules (2)1 599Wafer rotation option1 600Wafer table1 601Wafer tilt1 602Wafer transfer module1 603Wafer transport check1 604Warped Wafer Handling to 500 um1 605Whole wafers 75 mm-300 mm; sawn wafers up to 300 mm on film frames1 606for Si and SiC base wafer1 607in-vacuum wafer robotic transfer system1 608planetary wafer system1 609the sensor on the wafer chuck does not illuminate, although the inspection function remains operational1 610three inch square device / substrate chuck1 611three- to six-inch wafers1 612up to 12 in wafers1 613up to 450mm wafer size1 614up to 450°C1 615up to 6 in diameter1 616up to 6 in wafers1 617up to 6-inch diameter wafers; substrate size approximately 10 x 10 mm up to 100 mm, with 150 mm possible1 618up to 8-inch diameter substrates1 619up to 8-inch diameter wafers1 620up to 8-inch wafers1 621up to Φ8” workpieces1 622w/ TH 200 Wafer Loader1 623wafers up to 4″ (MA4) or 6″ (MA6); also 1 cm² pieces1 624Φ6'1 625φ2’ φ4’ φ6’ φ8’ Single Wafer Auto Transfer1 626φ2’, φ4’, φ6’, φ8’ single wafer auto transfer1 627(1) Wafer Orienter Chamber1 628・When loading with FixLoad, the handler reaches maximum speed, causing wafer misalignment due to recoil1 629(2) 25-wafer ADOE FOUP Load ports1 6301 x Tube, 2 x Wafer1 63110 Site Disk, 10 Wafer per Batch1 63210 in. system1 63310" Diameter Wafer Carrier:1 634100A, 3 sigma, full radius uniformity across a wafer1 63512 in.1 636125 Wafer Load Size1 637125mm1 63815-20” adjustable length from source to wafer1 63916 inch / 400 mm1 6402 Independent loadports, 25 wafer front opening unified pod (FOUP) carrier1 6412 in, 4 in, 6 in, 8 in1 6422 to 6 in.1 6432-inch, 2.5-inch, or 3-inch wafers; optionally 4×4-inch, 3.5×3.5-inch, or 3×3-inch masks1 64422 in1 64525 wafer load ports (Asyst) with robot transfer (2 paddies)1 64625-wafer FOUP Loadports (3)1 64725-wafer batch1 6482nd EPROM has the firmware for wafer cassettes (in spare)1 6493 Station Wafer Handler1 6504 in1 6514 in, 5-6 in, 8 in, 12 in1 6524 in. wafers; 5-8 in. wafers1 6534 to 141 6544-inch1 6554-inch wafers1 6564-inch wafers; 5-6-inch wafers; 8-inch wafers; 12-inch wafers1 6574-inch wafers; convertible to 3-inch or 6-inch platforms1 6584-inch, 5-inch, 6-inch1 6594-inch, 5-inch, 6-inch, 8-inch1 660450 x 500 mm1 6614” to 12”1 6625 in, 6 in, or 4 in wafers1 6635-6 in. wafers; 8 in. wafers; 12 in. wafers1 664525 um +/- 25 um sample thickness default configuration1 6656 in. system1

666Discontinued33 667Legacy33 668Cancelled1 669Mature1 670Pre-production1 671Latest model1 672Latest locomotive in the MPXpress family1

Counts are indicative of the cited catalog and update as entries are verified.

Browse by dimension

By categoryWhat the tool does

By manufacturerWho made it

By wafer sizeWhat it processes

By lifecycleWhere it is in its life

By tool familyLines of related models