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165Applied Materials1520 166KLA559 167Agilent342 168Lam Research296 169Tokyo Electron288 170Nikon241 171Hitachi209 172Thermo Fisher172 173Advantest156 174Keysight146 175Disco143 176Teradyne142 177SUSS MicroTec136 178Tektronix131 179ASM119 180Onto Innovation118 181SCREEN108 182Axcelis99 183Edwards96 184Pfeiffer92 185Semitool91 186Canon90 187ASML89 188YES84 189Accretech83 190Bruker80 191MKS77 192Veeco72 193Varian69 194Olympus68 195Kulicke & Soffa67 196Oxford Instruments65 197EV Group65 198Blue M62 199Strasbaugh62 200Ulvac62 201Perkin Elmer61 202Zeiss60 203Panasonic60 204Nordson56 205JDSU50 206Electroglas44 207Seiko Epson43 208Leybold43 209Advanced Energy42 210Zygo42 211Juki41 212ESPEC41 213SVG36 214Esec36 215Brooks36 216Aixtron36 217Mitutoyo36 218Heller35 219LTX-Credence35 220Plasma-Therm34 221CHA33 222Thermotron31 223Newport31 224West Bond31 225Temescal30 226Filmetrics30 227Tegal29 228Fuji29 229Denton Vacuum29 230Signatone27 231Nitto27 232MPI26 233Cascade Microtech26 234ENI26 235PR Hoffman25 236Laurell25 237Branson25 238Sumitomo24 239Multitest24 240Lapmaster24 241Mattson23 242SPTS23 243Wyko22 244Samsung22 245Besi22 246CEE22 247Asyst22 248Neslab21 249Chroma20 250Speedline20 251Despatch19 252Dek19 253Lindberg19 254Siemens19 255Logitech19 256Rigaku18 257Shinkawa18 258Yamaha18 259SMC18 260Takatori18 261DAIHEN18 262Palomar17 263Tenney17 264Rorze16 265Ultratech16 266Meyer Burger16 267Micromanipulator16 268Optorun16 269Buehler16 270Koh Young16 271AJA16 272Ismeca16 273BTU15 274Hesse & Knipps15 275Micro-Vu15 276OAI15 277Cohu14 278STS14 279Genmark14 280MRSI14 281ESI13 282Vitronics13 283Camtek13 284Nutek13 285CyberOptics13 286Ultron13 287JEOL13 288Malvern Panalytical13 289Leica13 290Sonix12 291Hanwha12 292Yaskawa12 293Nissin12 294View Engineering12 295SSEC11 296ADT10 297SCIEX10 298Comdel9 299Trumpf9 300Headway9 301Mydata9 302Ontrak9 303GCA9 304DEK8 305Thermco8 306Test Research8 307Coherent8 308Blanchard8 309Eagle8 310Finetech8 311FormFactor8 312LPKF7 313Towa7 314Karl Suss7 315OGP7 316Electrovert7 317Fico6 318Exatron6 319Spea6 320Glenbrook6 321RECIF6 322F&K Delvotec6 323Nova6 324Spectra-Physics6 325Maury Microwave6 326MPM6 327Sonoscan6 328Wafab6 329Brewer Science6 330Semics6 331ERSA5 332Balzers5 333Struers5 334Tystar5 335Woollam5 336YXLON5 337Rasco5 338Mellen5 339Assembleon4 340Santa Clara Plastics4 341Raith4 342Dektak4 343Rame Hart4 344Seren4 345Kensington4 346Mahr4 347Nanometrics4 348Nanospec4 349Allied High Tech4 350Kawasaki4 351Quintel4 352Solitec4 353Orbotech4 354Melles Griot4 355TechWing4 356MyData4 357Riber3 358Hontech3 359Rofin3 360Yxlon3 361Staubli3 362VAT3 363Gaertner3 364Rudolph3 365Heidelberg Instruments3 366Trion3 367IPG3 368Kurt Lesker3 369Novellus3 370Universal Instruments3 371GigaMat2 372Parmi2 373PVA TePla2 374Audio DEV2 375Rehm2 376Proton2 377Datacon2 378Alcatel2 379August2 380Angstrom Engineering2 381Optimum2 382Dage2 383LEO2 384ABM2 385GKG2 386Chemical Safety Technology2 387Dynapace2 388Specialty Coating Systems2 389Nanoscribe1 390Keyence1 391Aeroflex1 392Therma-Wave1 393South Bay Technology1 394Hybond1 395Asahi1 396Simplimatic1 397FEI1 398Toho Technology1 399Orient Service1 400J.A. Woollam1 401memsstar1 402AccoTest1 403MicroCraft1 404Bruce1 405Tescan1 406Hamatech1 407Tousimis1 408FitTech1 409Epilog1 410STEAG1 411Tri1 412Thermawave1 413Eaton1

414200mm53 415100mm38 416150mm33 417300mm23 4186"18 4198"15 4204"13 4213"9 4222"6 423Manual wafer load substrate bonder4 42476mm3 42512"3 426Single wafer2 4276 in2 42825 Wafer Slot Cassette2 429Wafer Loader2 43050mm2 4316-inch diameter stage2 43210 in.2 433Wafer table with wafer expander for 8”2 43475 mm to 100 mm2 435up to 6-inch wafers2 43675 mm to 150 mm round substrates; rectangular substrates from 100 mm to 125 mm on a side2 4373 in, 4 in, 5 in, 6 in, 8 in, 12 in2 4385"2 439up to Φ8”2 440For Wafer Centering Device2 4418 in. wafers2 442Batch Solvent Processor for Wafer Cleaning2 443Wafer Mapping2 4446 in.2 4456” wafer loading through the loadlock is possible1 44675 mm to 150 mm round substrates; square and rectangular substrates1 44775mm to 200mm wafers1 4488 in (190-1600 nm)1 4498-inch1 450A 1KW lamp for wafer heating1 451Auto Alignment System (Needle Tip, Wafer)1 452Auto loader (EFEM), wafer transfer system, load lock chamber, process chamber, operation panel.1 453Automatic Beam Alignment on wafer1 454Bare Wafer Inspection Station1 455Bare wafer inspection station1 456Below Wafer1 457Brooks TM (Transfer Module) with four Wafer Manual Load Lock1 458Capable of thermo compression, fusion or anodic wafer bonding1 459Capable of working with wafer masks up to 9″ x 9″1 460Cassette to Cassette Single Wafer Etcher1 461Ceramic high stability wafer chuck1 462Continuous clampable wafer table for dry WSs: Absent1 463DBM 2407 V 2 Wafer Handling Robot1 464Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, Notch1 465Does not have the exposure optics. It is just a manual aligner for wafer bonding1 466Dual cassette wafer handling1 467Entegris FA 200-85 MT 7902 Wafer Cassette1 468For nondestructive wafer analysis1 469Franklin Mechanical wafer loader1 470Front & Backside Wafer ID Reader (RFID)1 471Full Wafer Dual Beam1 472Grip Ring Holder or Wafer frame1 473High precision micrometer for wafer alignment adjustment1 474Ideal for photovoltaic, wafer, and coating characterization (solar cell reflectance and antireflection studies)1 475Includes PSC Calibration Wafer1 476Includes thin wafer handling kit1 477Integrated Wafer Cleaning System with Atomizing Nozzle1 478Interface Unit (IRA) for Canon FPA-3000 i5 stepper including one multi-buffer unit and Wafer edge exposure (WEE)1 479Laser Wafer Mapping1 480Linear Wafer Tracks1 481Load port-TDK with wafer mapping and RFID reader1 482Manual wafer loading1 483Manual wafer lock1 484Mask / Wafer Handling:1 485Mini-Environment Wafer Loading Module (EFEM)1 486Mk1 3 KW lamp (provide wafer heating)1 487Motorized swivel arm Wafer loading trays required for desired wafer size ic devices.1 488Multiple IOSS Wafer ID Reader1 489No wafer handler1 490One wafer manual loader1 491Only one wafer size at a time1 492Parallel wafer flow processing software option (simultaneous coat & develop)1 493Patented Wafer Chuck or Holding Device1 494Platen3 - Wafer Buff1 495Quartz Wafer1 496Robot Unit– automated wafer handling between cassettes and chuck tables.1 497Robot Wafer handling1 498Samples ranging in size from 10mm to 150mm1 499Silicon and Silicon on Insulator (SOI) wafers1 500Single FOUP Wafer Loader (Right)1 501Single Wafer (LOP)1 502Single Wafer Loader1 503Single Wafer SiC Substrate1 504Standard PDP 11/93 Computer & Silicon Carbide Wafer Loader Type 1 Conversion on it1 505Supports non-standard wafer types (Mems, Taiko, Thin)1 506The direction of wafer flow is right to left1 507Three simultaneous color defect review methods: on-the-fly, high resolution, whole wafer1 508Tool scans a wafer in a meander path1 509Universal wafer handler1 510Up to 6-inch wafers1 511Up to 8-inch wafers1 512Wafer Alignment:1 513Wafer Backside Rinse1 514Wafer Cooling1 515Wafer Hander:1 516Wafer Handler1 517Wafer Handling1 518Wafer I.D Reading1 519Wafer ID Reader1 520Wafer Notch Visual Monitoring Alignment Option1 521Wafer Orienter1 522Wafer Profiler Kit1 523Wafer Ring Holder,1 524Wafer Stage1 525Wafer System:1 526Wafer Table1 527Wafer Thickness 350μm ~ 1100μm1 528Wafer Thickness Measurement1 529Wafer Tilt Monitor1 530Wafer Transfer1 531Wafer Transfer Machine1 532Wafer Transfer Robot x 1 (1 Block System)1 533Wafer Transfer Robot:1 534Wafer Transfer System1 535Wafer X-Axis is out of order1 536Wafer auto load/unload1 537Wafer bonding at pressures 5e-5 to 3e-3 Torr and 50*C to 550*C1 538Wafer chambers1 539Wafer chuck (1)1 540Wafer chuck and standard sample holder1 541Wafer end effector1 542Wafer handler1 543Wafer imaging ability; entire surface of 8” or 12” wafer1 544Wafer kit sensor1 545Wafer loss sensor1 546Wafer on Gripper Sensor1 547Wafer orientor1 548Wafer processing modules (2)1 549Wafer rotation option1 550Wafer table1 551Wafer tilt1 552Wafer transfer module1 553Wafer transport check1 554Warped Wafer Handling to 500 um1 555Whole wafers 75 mm-300 mm; sawn wafers up to 300 mm on film frames1 556for Si and SiC base wafer1 557in-vacuum wafer robotic transfer system1 558planetary wafer system1 559three inch square device / substrate chuck1 560three- to six-inch wafers1 561up to 12 in wafers1 562up to 450mm wafer size1 563up to 450°C1 564up to 6 in diameter1 565up to 6 in wafers1 566up to 8-inch diameter substrates1 567up to 8-inch diameter wafers1 568up to 8-inch wafers1 569up to Φ8” workpieces1 570w/ TH 200 Wafer Loader1 571wafers up to 4″ (MA4) or 6″ (MA6); also 1 cm² pieces1 572Φ6'1 5731 x Tube, 2 x Wafer1 574・When loading with FixLoad, the handler reaches maximum speed, causing wafer misalignment due to recoil1 57510 Site Disk, 10 Wafer per Batch1 57610 in. system1 57712 in.1 578125 Wafer Load Size1 579125mm1 58015-20” adjustable length from source to wafer1 5812 Independent loadports, 25 wafer front opening unified pod (FOUP) carrier1 5822 to 6 in.1 5832-inch, 2.5-inch, or 3-inch wafers; optionally 4×4-inch, 3.5×3.5-inch, or 3×3-inch masks1 58425 wafer load ports (Asyst) with robot transfer (2 paddies)1 58525-wafer FOUP Loadports (3)1 58625-wafer batch1 5872nd EPROM has the firmware for wafer cassettes (in spare)1 5884 in1 5894 in, 5-6 in, 8 in, 12 in1 5904 in. wafers; 5-8 in. wafers1 5914 to 141 5924-inch1 5934-inch wafers1 5944-inch wafers; 5-6-inch wafers; 8-inch wafers; 12-inch wafers1 5954-inch wafers; convertible to 3-inch or 6-inch platforms1 5964-inch, 5-inch, 6-inch1 5974-inch, 5-inch, 6-inch, 8-inch1 5985 in, 6 in, or 4 in wafers1 5995-6 in. wafers; 8 in. wafers; 12 in. wafers1 600525 um +/- 25 um sample thickness default configuration1 6016 in. system1 6026-8 in. (Auto Detect)1 6036-inch diameter microchamber and thermal chuck1 6046-inch wafers1

605Legacy23 606Discontinued13 607Latest locomotive in the MPXpress family1 608Latest model1

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