Brooks

ATR 8 Robot

Research Quality: 20% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

BrooksATR 8 Robot

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What it is

The Brooks ATR 8 robot is a wafer-handling robot designed for 300 mm wafers, commonly integrated into semiconductor equipment such as LAM tools and other process modules.^[1]^[2]^[3]

What do the numbers mean?

Wafer handling1

Wafer Sizes: 12 inch^[1]

Configuration & options4

Lam Tool^[1]
Manufacturer: Brooks^[1]
Model: ATR 8^[1]
Description: 12" Lam Tool^[1]

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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Frequently asked questions

What wafer size does the Brooks ATR 8 handle?

The Brooks ATR 8 is designed to handle 300 mm wafers.^[1]^[2]

Which process tools integrate the Brooks ATR 8?

The robot is integrated into tools such as the Novellus Sequel, Vector, Altus, Inova XT, LAM 2300, and SUSS ACS200/300 series, among others.^[2]

Not publicly documented

The following facts about the ATR 8 Robot are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ATR 8 Robot are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the ATR 8 Robot are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the ATR 8 Robot are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the ATR 8 Robot are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the ATR 8 Robot is not on record.
Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (5)Every fact above is drawn from these public sources

[1]inventory listing
[2]ATR8 Robot - Eumetrys Robotics - Robot refurbishment and repair specialist — eumetrys-robotics.comeumetrys-robotics.com
[3]ATR-8 robot alone equipment list for sale | SDI fabsurplus.com — fabsurplus.comfabsurplus.com
[4]Brooks Automation ATR8 Robot Repair, Overhaul & Exchange for Lam 2300 V2 Etcher-Singsutech Semiconductor Technology (Suzhou) Co., Ltd — suzhou-pcb.comsuzhou-pcb.com
[5]Brooks ATM Robot (Reliance 3 Axis ATR8 robot) - YouTube — youtube.comyoutube.com