Waferpedia

Brooks

EKD-6J

Brooks EKD-6J family
Research Quality: 30% complete

The Brooks EKD-6J is a deep-profile meter interbase adapter. The Brooks EKD-6J has a 5.25-inch depth. The Brooks EKD-6J is designed for applications requiring extra space for additional capability.[1]

BrooksEKD-6J
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What is it?

The Brooks EKD-6J appears in the EKD Series of meter interbase adapters. The Brooks EKD-6J has a deep-profile 5.25-inch depth. The Brooks EKD-6J is intended for applications that need extra space for additional capability, including more active components and devices.

What can it run?

Process applications and technology nodes documented for this tool.

  • Applications requiring extra space to accommodate additional capability
  • Applications requiring more active components and devices

What do the numbers mean?

Dimensions & facilities3

Depth profile
Deep Profile[1]
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Depth
5.25"[1]
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Depth profile
Deep Profile 5.25" Depth[1]
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Configuration & options4

Category
Meter interbase adapter[1]
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Series
EKD Series[1]
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Meter form
4S[1]
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Design intent
Applications requiring extra space to accommodate additional capability, allowing the inclusion of more active components and devices.[1]
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Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
EKD Series———brooksutility.com[1]
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What replaced it?

Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the EKD-6J are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EKD-6J are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the EKD-6J are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the EKD-6J are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the EKD-6J is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the EKD-6J are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]brooksutility.com — brooksutility.combrooksutility.com
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Last updated Oct 7, 2026.

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