Edwards
IXA 2206 C Turbo
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The Edwards IXA 2206 C Turbo is a turbo pump used in vacuum systems.[1]
Applications
The pump is used in plasma etch, ECR etch, film deposition, sputtering, beam line pumping and station service, and ion implantation source service.[2]
It has an inlet of ISO250F, an exhaust of KF40, a pumping speed of 2,200 l/s for nitrogen, a compression ratio greater than 10^8 for nitrogen, an ultimate pressure of 1 x 10-9 Torr, and a weight of 136 lbs.[2]
What do the numbers mean?
No specifications recorded yet
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Where are the manuals?
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Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the Edwards IXA 2206 C Turbo?
It is a turbo pump.[1]
What inlet and exhaust connections are given for this pump?
The inlet is ISO250F and the exhaust is KF40.[2]
What pumping speed is given for nitrogen?
The pumping speed is 2,200 l/s for nitrogen.[2]
What processes is it used for?
It is used for plasma etch, ECR etch, film deposition, sputtering, beam line pumping and station service, and ion implantation source service.[2]
Not publicly documented
The following facts about the IXA 2206 C Turbo are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No specifications for the IXA 2206 C Turbo are on record.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IXA 2206 C Turbo are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the IXA 2206 C Turbo are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the IXA 2206 C Turbo are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the IXA 2206 C Turbo are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]Edwards STP-iXA2206C Turbo Pump — provac.comprovac.com
Last updated Jul 29, 2026.
