Laurell
EDC-HL-23 B
The Laurell EDC-HL-23 B is an EDC System spin coater. The Laurell EDC-HL-23 B is part of the 650-series. The Laurell EDC-HL-23 B supports a maximum substrate size of 150 mm (5" x 5").[1]
What it is
The EDC-HL-23 B is available in tabletop, in-deck, and on-deck mounting configurations.[1]
How it works
General reference — not yet source-verifiedThe EDC-HL-23 B is a spin coater that uses a rotating chuck to hold a substrate while a liquid resist is dispensed and spread by centrifugal force.
Where it fits in the process flow
General reference — not yet source-verifiedSpin coaters such as the EDC-HL-23 B are used to apply photoresist or other thin films to substrates in semiconductor and microelectronics fabrication.
The spin-coating step typically precedes photolithography, where the coated substrate is exposed to pattern the resist.
Applications
General reference — not yet source-verifiedThe EDC-HL-23 B is suitable for applying photoresist in microfabrication processes such as MEMS, microfluidics, and thin-film device manufacturing.
What do the numbers mean?
Wafer handling1
Control & software1
Configuration & options5
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the EDC-HL-23 B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EDC-HL-23 B are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the EDC-HL-23 B are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the EDC-HL-23 B are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the EDC-HL-23 B are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the EDC-HL-23 B is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]images.laurell.com — images.laurell.comimages.laurell.com
Last updated Oct 7, 2026.
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