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MKS

722C

MKS 722C family
Research Quality: 30% complete
MKS722C
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Power

24 Volts @ 1 Amp[1]

Vacuum

310 kPa (2325 Torr)[1]

Performance

0.50% of reading[1]

How it works

Capacitance manometers are highly accurate and repeatable pressure sensors that are insensitive to gas composition. The sensing element in a capacitance manometer is a diaphragm that deflects with applied pressure, changing capacitance. MKS manufactures the diaphragm gauges almost exclusively using nickel-based alloys such as Inconel and Incoloy, making them highly resistant to corrosion when matched to the process.[1]

The 722C provides a signal output of 0 - 10 VDC or 0 - 5 VDC. The sensors are fully welded and 100% leak-checked prior to assembly. In the event of an extremely rare failure of the diaphragm, the process gases are completely contained within the sensor, preventing escape to the outside environment.[1]

What do the numbers mean?

Power & electrical1

Supply Voltage
24 Volts @ 1 Amp[1]
Accurate?

Vacuum & pumping2

Full Scale Range
1 to 25,000 Torr (1.33 x 10^2 to 3.33 x 10^6 Pa)[1]
Accurate?
Overpressure Limit
310 kPa (2325 Torr)[1]
Accurate?

Performance1

Accuracy
0.50% of reading[1]
Accurate?

Configuration & options3

Signal Output
0 - 10 VDC[1]
Accurate?
Communication
RS232 standard, RS485 optional[1]
Accurate?
Product Type
Capacitance manometer (Baratron)[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Full Scale Range1 to 25,000 Torr (1.33 x 10^2 to 3.33 x 10^6 Pa)[1]
  • Overpressure Limit310 kPa (2325 Torr)[1]
  • Supply Voltage24 Volts @ 1 Amp[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the full-scale pressure range of the MKS 722C?

The MKS 722C has a Full Scale pressure range of 1 to 25,000 Torr, which corresponds to 1.33 x 10^2 to 3.33 x 10^6 pascals.[1]

What is the accuracy of the MKS 722C?

The MKS 722C has an accuracy of 0.50% of reading.[1]

What signal outputs does the MKS 722C provide?

The MKS 722C provides a signal output of 0 - 10 VDC or 0 - 5 VDC.[1]

What is the overpressure limit of the MKS 722C?

The overpressure limit for the MKS 722C is 310 kPa, or 2325 Torr.[1]

Not publicly documented

The following facts about the 722C are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 722C are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 722C are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 722C are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 722C are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 722C is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]api.p1.mks.com — api.p1.mks.comapi.p1.mks.com
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Last updated Sep 22, 2026.

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