MKS
The DA05A includes both an analog output and EtherCAT communications, allowing for flexible integration with process control systems.[1]
The DA05A can be ordered with standard or etch/fluorine/deposition friendly sensor options, making it suitable for use in a variety of reactive and corrosive gas environments.[1]
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The DA05A has a full-scale pressure of less than 1.33 x 10^2 Pa, which is less than 1 Torr.[1]
The DA05A includes both analog output and EtherCAT communications.[1]
The DA05A is available with standard or etch/fluorine/deposition friendly sensor options.[1]
The following facts about the DA05A are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DA05A are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the DA05A are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the DA05A are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the DA05A are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the DA05A is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Last updated Sep 22, 2026.