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YES

58TASM

Vapor Prime / Image Reversal / Silylation system4-inch, 5-inch, 6-inchYES 58TASM family
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YES58TASM
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Wafer size

4-inch, 5-inch, 6-inch

Performance

2 full loads/hr[1]

What is it?

The source’s product specification chart identifies the YES-58TASM within the Vacuum Bake / Vapor Prime product line and states that it supports above-listed Vapor Prime and Image Reversal capacities, or Silylation on 4 cassettes of 5- or 6-inch wafers or 6 cassettes of 4-inch wafers. The chart also gives its throughput, HMDS usage, temperature stability, dimensions, weight, and power requirements.

What can it run?

Process applications and technology nodes documented for this tool.

  • Vapor Prime
  • Image Reversal
  • Silylation

What do the numbers mean?

Power & electrical1

Power
System vacuum pump: 115V, 60Hz, 1 Phase, 30A or 220V, 50Hz, 1 Phase, 15A; 115V, 60Hz, 1 Phase, 7A or 220V, 50Hz, 1 Phase, 3.5A[1]
Accurate?

Vacuum & pumping1

Line
Vacuum Bake / Vapor Prime Product Specification Chart[1]
Accurate?

Wafer handling2

Capacity
Silylation on 4 cassettes of 5- or 6-inch wafers or 6 cassettes of 4-inch wafers[1]
Accurate?
HMDS usage
< 7 ml/200 wafers (>50 prime cycles/pint)[1]
Accurate?

Performance1

Throughput
2 full loads/hr[1]
Accurate?

Dimensions & facilities3

Chamber dimensions
20-in (508mm) high, 20-in (508mm) wide, 15.12-in (384mm) deep[1]
Accurate?
System dimensions
26-in (660mm) high, 33.75-in (858mm) wide, 25-in (635mm) deep[1]
Accurate?
Weight
350 pounds stand-alone; 500 pounds international shipping (includes crate)[1]
Accurate?

Configuration & options3

Model
YES-58TASM[1]
Accurate?
Function
Vapor Prime, Image Reversal, Silylation[1]
Accurate?
Temperature stability
160°C max ± 2°C[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • LineVacuum Bake / Vapor Prime Product Specification Chart[1]
  • PowerSystem vacuum pump: 115V, 60Hz, 1 Phase, 30A or 220V, 50Hz, 1 Phase, 15A; 115V, 60Hz, 1 Phase, 7A or 220V, 50Hz, 1 Phase, 3.5A[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 58TASM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 58TASM are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 58TASM are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 58TASM are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 58TASM are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 58TASM is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
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Last updated Jul 29, 2026.