Zygo
Zegage 3D Optical Surface Profiler
How it works
The Zygo Zegage is equipped with a 1-fold super-long working distance (SLWD) Michelson interferometer that is adaptable to a nosepiece. The instrument has a working distance of 40.0 millimeters and a numerical aperture of 0.03. The Zegage can accept up to one additional SLWD or long working distance (LWD) lens. The system runs Mx control and analysis software on a Microsoft Windows 7 platform with a Dell PC and 24-inch monitor.[1]
Where it fits in the process flow
The Zygo-zeGage 3D optical surface profiler was used in a research setting to measure the morphology of diffractive microstructures on a polyimide membrane after fabrication. The profiler assessed the edge steepness and surface smoothness of the microstructures. The measurement results were used to calculate the wave-front error introduced by the fabrication process.[2]
What do the numbers mean?
Optics & imaging2
- max. one additional SLDW or LWD lens[1]
Control & software5
Configuration & options5
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of interferometer does the Zygo Zegage use?
The Zygo Zegage uses a 1-fold super-long working distance (SLWD) Michelson interferometer that is adaptable to a nosepiece.[1]
What is the working distance of the Zygo Zegage?
The working distance of the Zygo Zegage is 40.0 millimeters.[1]
Can additional lenses be used with the Zygo Zegage?
The Zygo Zegage can accept up to one additional SLWD or long working distance (LWD) lens.[1]
What software and computer does the Zygo Zegage typically run?
The Zygo Zegage runs Mx control and analysis software on a Microsoft Windows 7 platform with a Dell PC and 24-inch monitor.[1]
In what research application was the Zygo-zeGage used?
The Zygo-zeGage 3D optical surface profiler was used to measure the morphology of diffractive microstructures on a polyimide membrane for fabricating Fresnel diffractive lenses.[2]
Not publicly documented
The following facts about the Zegage 3D Optical Surface Profiler are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Zegage 3D Optical Surface Profiler are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Zegage 3D Optical Surface Profiler are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Zegage 3D Optical Surface Profiler are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Zegage 3D Optical Surface Profiler are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Zegage 3D Optical Surface Profiler is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]https://ieeexplore.ieee.org/ielx7/4563994/9116844/09104935.pdf — ieeexplore.ieee.orgieeexplore.ieee.org
Last updated Aug 14, 2026.
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