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Comparison ledger

AP 3000 eversus1007

Accretech AP 3000 e, KLA 1007, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
AP 3000 eAccretech
1007KLA
OEMAccretechKLA
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAccretech AP 3000KLA 1007
Cited variants—
Specifications
ConfigurationTri-temp prober compatible with HP93K 12" POGO type tester[2]—
Temperature capabilityTri-temp[3]—
Tester compatibilityHP93K 12-inch POGO type tester[2]—
Typeautomatic wafer prober[4]—
Wafer size200mm (8-inch) and 300mm (12-inch)[4]150 mm[6]
Precision+/- 0.8um and +/-1.5um overall precision (Accretech specified condition)[5]—
Operating characteristicshigh precision wafer probing at low vibration and low noise levels[5]—
Automationsingle or dual loader with AMHS automation[5]—
Optionsautomatic probe card exchange (APC)[5]—
Manufacturer—KLA[6]
Model—1007[6]
Description—Wafer Prober[6]
Convertible to 8 inch wafer size—Yes[6]
Vintage—01.06.1995[6]
Make—KLA[7]
Equipment type—Prober[7]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]waferpedia.comwaferpedia.com
  5. [5]accretech.com.myaccretech.com.my
  6. [6]fabsurplus.comfabsurplus.com
  7. [7]Equipment inventory listing