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Accretech

AP 3000 e

Test & ProbeAccretech AP 3000 family
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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Accretech / TSK AP 3000 e is a tri-temp prober used for semiconductor testing. The AP 3000 e is compatible with HP93K 12-inch POGO type testers. The AP 3000 e is also offered in a DD Tri-Temp configuration.[1][2]

AccretechAP 3000 e
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What it is

General reference — not yet source-verified

A wafer prober is semiconductor test equipment that brings a processed wafer into controlled contact with a probe card so electrical measurements can be performed before singulation and packaging. Wafer probers serve the wafer test stage by positioning, aligning, and thermally conditioning wafers for connection to external test instrumentation.

How it works

The AP3000/AP3000e is designed for high precision, high throughput in index move, wafer handling, and wafer alignment, with low vibration and low noise. The AP3000/AP3000e inherits functions and operability from previous models and maintains compatibility of recipe and map data. The AP3000/AP3000e includes standard anti-virus and anti-malware software. The AP3000/AP3000e offers options including needle cleaning, fan filter unit, HF jig or manipulator, tester interface, dual loader or AMHS automation, head stage tilt, ambient or hot or low-temperature or low-noise chucks, auto probe card exchange, cassette ID reading, wafer ID reading, network interfaces, probe card auto setup, and probe card PGV. The AP3000/AP3000e supports PLP testing for up to 300 mm square.[6]

The AP3000 / AP3000e operates at overall precision of +/- 0.8 um and +/- 1.5 um under Accretech specified conditions. The AP3000 / AP3000e can process 300 mm or 200 mm bare wafers. The AP3000 / AP3000e is available in single or dual loader configuration with AMHS automation. The AP3000 / AP3000e provides chuck choices for ambient operation, hot temperature up to 200C, low temperature down to -55C, and low-noise use. The AP3000 / AP3000e is compatible with major semiconductor testers and offers GP-IB interface and prober network options including Veganet, Light-Veganet, Vega-Planet, and GEM.[5]

Where it fits in the process flow

General reference — not yet source-verified

Wafer probing sits after wafer fabrication and before dicing, assembly, and final package test. A wafer prober is used after front-end and back-end wafer processing has produced testable devices and before downstream steps separate the die and place them into packages.

Applications

General reference — not yet source-verified

Wafer probers are used for wafer-level electrical test of integrated devices before singulation. Typical uses include device screening, parametric measurement, functional verification, temperature-conditioned test, and die map generation for later manufacturing steps.

What do the numbers mean?

Wafer handling6

Type
automatic wafer prober[4]
Accurate?
Wafer size
200mm (8-inch) and 300mm (12-inch)[4]
Accurate?
Operating characteristics
high precision wafer probing at low vibration and low noise levels[5]
Accurate?
Automation
single or dual loader with AMHS automation[5]
Accurate?
Options
cassette ID reading[5]
Accurate?
Options
wafer ID reading (top surface / back surface)[5]
Accurate?

Performance1

Precision
+/- 0.8um and +/-1.5um overall precision (Accretech specified condition)[5]
Accurate?

Configuration & options7

Tri-temp prober compatible with HP93K 12" POGO type tester[1]
Accurate?
DD Tri-Temp[2]
Accurate?
Temperature capability
Tri-temp[3]
Accurate?
Tester compatibility
HP93K 12-inch POGO type tester[1]
Accurate?
Tester compatibility
HP93K 12" POGO type tester[1]
Accurate?
Options
automatic probe card exchange (APC)[5]
Accurate?
Options
prober network (Veganet, Light-Veganet, Vega-Planet, GEM)[5]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
DD Tri-Temp—2022Includes DD (unknown meaning) and tri-temp capabilityEquipment inventory listing[2]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What wafer sizes can the AP3000 / AP3000e process?

The AP3000 / AP3000e can process 300 mm or 200 mm bare wafers.[5]

Not publicly documented

The following facts about the AP 3000 e are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the AP 3000 e are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the AP 3000 e are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the AP 3000 e are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the AP 3000 e is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the AP 3000 e are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]waferpedia.comwaferpedia.com
  5. [5]accretech.com.my — accretech.com.myaccretech.com.my
  6. [6]AP3000/AP3000e|Probing Machines | ACCRETECH - TOKYO SEIMITSU — accretech.comaccretech.com
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Last updated Oct 20, 2026.

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