Waferpedia

Comparison ledger

UF 3000 EX Automatic WaferversusP 12 XL

Accretech UF 3000 EX Automatic Wafer, Tokyo Electron P 12 XL, side by side. Every value shown is drawn from the cited encyclopedia entries.

Documented as functional equivalents— Same function class: Test & Probe, null[1]
Side-by-side comparison of selected equipment models
Attribute
P 12 XLTokyo Electron
OEMAccretechTokyo Electron
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAccretech UF 3000Tokyo Electron P 12
Specifications
OS VerS6.39.BH[2]—
InputAC 210V Single pulse[2]—
Configuration12" Nickel Hot Chucktop[2]Tri-Temp[5]
Head Plate Center Hole Size528mm[2]—
TypeAutomatic wafer prober[3]—
Hot temp controllerRoom~150C[2]—
OS versionS6.39.BH[2]—
Chucktop12" Nickel Hot Chucktop[2]—
Z stageStandard Z Force Stage[2]—
LoaderOpen Foub Single Loader[2]—
OCRType 6 OCR (Rear-Face Only)[2]—
Probe card trayAuto Probe Card Tray (O)[2]—
Cleaning unit blockCleaning Unit Block (O), Cleaning Ceramic Plate(X)[2]—
PortsUSB Port; Ethernet Port[2]—
Card holder clamp motor optionNo[2]—
Auto tilt optionNo[2]—
Configured wafer sizes8" or 12" wafers[4]—
Chuck typeNickel[4]—
FOUP portSingle FOUP port for 25 wafers[4]—
TransportDual robotic wafer transport arms[4]—
AlignmentAuto needle alignment; advanced wafer alignment unit; alignment camera E1-500[4]—
StageQuad-Pod Z stage[4]—
Interface optionsGPIB interface option; Ethernet interface option[4]—
Process—PPF[5]
Phase—1 Phase[6]
Voltage—208 V[6]
Wafer Size—12 inch[8]
Tri-Temp—Tri-Temp 2002 (10), 2003 (3), 2004, 2005 Vintage[5]
OEM—Tokyo Electron[5]
Model—P 12 XL[5]
Equipment type—Prober[5]
Wafer sizes—12 inch[5]

Plan your fab

Building a Test & Probe process? Get a complete equipment list.

Open the fab equipment planner →
Sources (9)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]jadgrp.comjadgrp.com
  5. [5]inventory listing
  6. [6]inventory listing
  7. [7]inventory listing
  8. [8]Equipment inventory listing
  9. [9]Equipment inventory listing