Waferpedia

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UF 3000 LX Automatic Waferversus1007

Accretech UF 3000 LX Automatic Wafer, KLA 1007, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
1007KLA
OEMAccretechKLA
CategoryTest & ProbeTest & Probe
Wafer sizeWafer I.D Reading—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAccretech UF 3000KLA 1007
Specifications
ConfigurationRoom/hot chuck[1]—
Wafer sizeWafer I.D Reading[2]150 mm[4]
OEMAccretech / TSK[1]—
ModelUF 3000 LX[1]1007[4]
Equipment typeAutomatic Wafer Prober[1]Prober[5]
CategoryTest & Probe[3]—
Wafer I.D ReadingWafer I.D Reading[3]—
Probe Pad Auto AlignmentProbe Pad Auto Alignment[3]—
Probe Mark InspectionProbe Mark Inspection[2]—
Needle Cleaning UnitNeedle Cleaning Unit[2]—
Special functionAccepting 25 slot cassette[2]—
GP-IB I/FGP-IB I/F[2]—
Test Head Check FunctionNeedle align interlock[2]—
SAPCSAPC[2]—
Dual TempRoom ~ Hot[2]—
Motorized Test Head docking KitFor ND4[2]—
Room/hot chuckRoom/hot chuck[1]—
V93K dockingV93K docking[1]—
Manufacturer—KLA[4]
Description—Wafer Prober[4]
Convertible to 8 inch wafer size—Yes[4]
Vintage—01.06.1995[4]
Make—KLA[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]Equipment inventory listing