Comparison ledger
ADE AFS-3220, Hitachi CG 4100, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | AFS-3220ADE | CG 4100Hitachi |
|---|---|---|
| OEM | ADE | Hitachi |
| Category | — | — |
| Wafer size | Wafer Equipment | Wafer Equipment |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ADE AFS-3220 | Hitachi CG 4100 |
| Specifications | ||
| Wafer size | Wafer Equipment[1] | Wafer Equipment[2] |
| Currently Configured for | 300mm[1] | 300mm[2] |
| Manufacturer | ADE[1] | — |
| Model | AFS-3220[1] | — |
| Equipment type | Wafer Characterization Metrology Equipment[1] | — |
| Configured wafer size | 300mm[1] | — |
| OEM manufacturing date | 2002[1] | — |
| Install date | 2002[1] | — |
| Date of last PM | 2017/4/13[1] | — |
| System status | Off-Line[1] | — |
| Handler type | BROOKS[1] | — |
| Robot type | BROOKS[1] | — |
| End-effector type | BROOKS[1] | — |
| Pre-aligner | Mini-Environment[1] | — |
| Control system | Windows NT[1] | — |
| Date of Manufacture | — | 2013-01-01[2] |
| Missing or Damaged parts | — | Fab confirmed there were no missing or damaged parts.[2] |
| Vendor | — | HITACHI[2] |
| VID | — | VID761[2] |
| SW Version | — | 35.47[2] |
| Resolution | — | 1.8nm[2] |
| throughput | — | 42wafer/h[2] |
| MAM Time | — | 2.8sec[2] |
| Stage Landing Accuracy | — | ±1μm[2] |