Comparison ledger
Applied Materials 0010-03254 E Chuck, KLA Surfscan 6200 Refurbishment Services, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | |
|---|---|---|
| OEM | Applied Materials | KLA |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | KLA Surfscan 6200 |
| Specifications | ||
| Configuration | — | Refurbishment Only of Client System[1] |
| Machine type | — | Wafer surface contamination analysis system and laser particle detector for measuring defect densities on unpatterned wafers[2] |
| Illumination source | — | Argon-ion laser at 488 nm[2] |
| Detection sensitivity | — | Detection sensitivity down to 0.10 µm[2] |
| Defect detection capability | — | Locates, sizes, and counts defects in semiconductor substrate material down to 0.157 um at a 95% capture rate and down to 0.09 um at an 80% capture rate[3] |
| Scanning method | — | Laser beam scanning for detecting defect contamination[3] |
| Data display | — | Color-coded wafer maps, histograms, and summaries[3] |
| Substrate diameter | — | 125 mm[3] |
| Gain range | — | 1 to 8 (gain=1 corresponds to size 63 um or 250 um2; gain=8 corresponds to size 0.12 um or 0.005 um2)[3] |
| LPD count limit | — | 0 to 99999[3] |
| Throughput settings | — | High, medium, normal, low[3] |
| Detection mechanism | — | Laser beam illumination, scattered-light collection through an optics system, and photomultiplier tube (PMT) amplification[3] |
| Refurbishment service scope | — | Refurbishment only of client system[1] |
| Refurbishment laser | — | Solid state laser with 3 year warranty[1] |
| Refurbishment SBC | — | New/upgraded SBC replacing the old Trenton SBC[1] |
| Refurbishment storage | — | Solid state hard drive and solid state back up hard drive[1] |
| Refurbishment connectivity | — | USB 2.0 ready, new USB mouse, new USB keyboard[1] |
| Refurbishment warranty | — | 1 year parts warranty on system[1] |
| Refurbishment lead time | — | 12 to 16 weeks (depending on production schedule)[1] |