KLA
The KLA Surfscan 6200 is a wafer surface contamination analysis system and laser particle detector used for measuring defect densities on unpatterned wafers, with an argon-ion laser illumination at 488 nm and detection sensitivity down to 0.10 µm. The Surfscan 6200 locates, sizes, and counts defects in semiconductor substrate material down to 0.157 um at a 95% capture rate and down to 0.09 um at an 80% capture rate. Surfscan 6200 Refurbishment Services are offered for a client system refurbishment package that includes a solid state laser and several upgraded components.[1][2]
Plate 01Video 1 - KLA-Tencor Surfscan 6200 Defect Inspection System (ID# 3744)
Plate 02KLA-Tencor Surfscan 6200 Defect Inspection System (ID# 4263)
Plate 03KLA-Tencor Surfscan 6200 Defect Inspection System(ID# 4271)
Plate 04KLA-Tencor Surfscan 6200 Defect Inspection System (ID# 3757)
Plate 05KLA-Tencor Surfscan 6200 Defect Inspection System (ID# 4137)
A Surfscan class instrument scans wafer surfaces with a laser beam and measures scattered light to detect defect contamination. The instrument then presents the results as wafer maps, histograms, and summary data.[2][4]
The instrument scans wafers held in a cassette and can load cassettes on the left indexer, the right indexer, or both indexers. The instrument uses recipe settings to control scan behavior, defect or haze selection, and display output.[2][4]
The instrument collects defects and haze data by illuminating the wafer surface with a laser beam, collecting scattered light through an optics system, and amplifying the scattered light with a photomultiplier tube.[2][4]
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The following facts about the Surfscan 6200 Refurbishment Services are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan 6200 Refurbishment Services are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Surfscan 6200 Refurbishment Services are on record.
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The control-system platform and OS era of the Surfscan 6200 Refurbishment Services are not on record.
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No publicly documented failure modes or field errata for the Surfscan 6200 Refurbishment Services are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Surfscan 6200 Refurbishment Services is not on record.
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Last updated Oct 13, 2026.
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