Waferpedia

Tool family

KLA Surfscan 6200

KLA2 entries
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Models in this family

  1. Surfscan 6200 Particle Defect
  2. Surfscan 6200 Refurbishment Services

    KLA Surfscan 6200 Refurbishment Services are offered for a client system refurbishment package that includes a solid state laser and several upgraded components.

All entries

  1. Surfscan 6200 Particle DefectKLA
    CategoryMetrology & Inspection
    1 spec
  2. Surfscan 6200 Refurbishment ServicesKLA

    KLA Surfscan 6200 Refurbishment Services are offered for a client system refurbishment package that includes a solid state laser and several upgraded components.

    10 specs