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0010-18024 Pyrometer AssemblyversusP 16 +

Applied Materials 0010-18024 Pyrometer Assembly, KLA P 16 +, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyKLA P 16 +
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]2A, 20in Hg @ 1cfm[2]
Phase—1 Phase[2]
Software—(OS) version 7.31.05 [Build 5][2]
Tool type—Stylus profilometer[3]
Measurement type—Step height, roughness, waviness, stress[3]
Vertical range—327 µm[3]
Wafer sizes—2, 3, 4, 5, 6, 8, 12 inch[3]
Stage—Fully motorized X-Y, Z, theta, and level stage[3]
Stylus—2 µm / 60D[3]
Operating system—Windows XP[3]
Applications—CMP monitoring and bump metrology[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com