Comparison ledger
Applied Materials 0010-47763 ASSY ESC Bonded Monopolar Dual Heated, EV Group 850 LT, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-47763 ASSY ESC Bonded Monopolar Dual HeatedApplied Materials | 850 LTEV Group |
|---|---|---|
| OEM | Applied Materials | EV Group |
| Category | Packaging & Bonding | Packaging & Bonding |
| Wafer size | — | Wafer ID Reader |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-47763 ASSY ESC Bonded Monopolar Dual Heated | EV Group 850 |
| Cited variants | — |
|
| Specifications | ||
| Configuration | Refurbished[2] | Basic Unit[3] |
| Software | — | EVG CIMFramework (without license)[3] |
| Wafer size | — | Wafer ID Reader[3] |
| Model | — | 850 LT[4] |
| OEM | — | EV Group[4] |
| Wafer sizes | — | 8 inch[3] |
| System type | — | Automated SOI / Direct Wafer Bonding System[1] |
| Application focus | — | SOI substrate manufacturing[1] |
| Process steps combined | — | Cleaning, alignment, pre-bonding, and IR-inspection[1] |
| Production mode | — | High volume production[1] |
| Maximum wafer size stated | — | Up to 300 mm wafers[1] |
| Thickness | — | 300 μm - 800 μm[3] |
| Category | — | Packaging & Bonding[4] |
| Automation | — | Fully-automatic[5] |
| Wafer size capability | — | Up to 300 mm wafers[1] |
| Wafer setup thickness | — | 300 μm - 800 μm[3] |
| Wafer ID Reader | — | Included[3] |
| LowTemp plasma activation | — | Used[1] |
| Cleaning module | — | One Cleaning Module[5] |
| Spinner chuck | — | One Spinner Chuck for 8”/200mm wafers[5] |
| DI water dispense line | — | One DI Water Dispense Line[5] |
| LowTemp plasma activation module | — | One LowTemp Plasma Activation Module[5] |
| Control interface | — | PC controlled with Windows based graphical user interface[5] |
| Access control | — | Password protected access levels[5] |
| High frequency RF generator | — | With matching unit[5] |
| Low frequency RF generator | — | With matching unit[5] |
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