EV Group
850 LT
What is it?
What do the numbers mean?
Wafer handling3
Control & software4
Configuration & options13
- Basic Unit[1]
- Handling Unit[1]
- High Performance SOI Quality Capabilities[1]
- Facility connections Through Machine Bottom Side[1]
- Modular Machine Platform[1]
- Material Mapping Unit (MMU) (4)[1]
- Additional Standard Pre-Aligner[1]
- Filter Fan Unit ISO 3 for Process and Handling Area[1]
- Filter Fan Unit ISO 3 for Process and Handling Area for 5th Module[1]
- Activated Carbon Filters[1]
- Ionizer Bar for Handling Area T-Frame[1]
- Charge Plate Monitor[1]
- Charge Plate[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 850 LT are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 850 LT are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 850 LT are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 850 LT are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 850 LT are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 850 LT is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]EVG|SOI Bonding Systeme — evgroup.com (Mar 12, 2017)web.archive.org
Last updated Jul 29, 2026.
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