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Comparison ledger

17099370 Outer strike plateversusNV GSD 100

Axcelis 17099370 Outer strike plate, Axcelis NV GSD 100, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
NV GSD 100Axcelis
OEMAxcelisAxcelis
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis 17099370 Outer strike plateAxcelis NV GSD 100
Specifications
ConfigurationUsed with Axcelis GSD 200[1]Electron Shower[3]
ManufacturerAxcelis[2]—
Model17099370 Outer strike plate[1]—
Part numberOEM number 17099370[2]—
Used withAxcelis GSD 200[1]—
ConditionNEW[2]—
Phase—3 Phase[3]
Input—208 V[3]
Output—160 KV[3]
Power—50 KVA[3]
Current—15 MA[3]
Type—Ion implanter[4]
Input voltage—208 V[3]
Electron shower—Present[5]
Drive—Direct drive[5]
Cell—Cell V6[3]
Control/software—Solaris[5]
Gas box—SDS Gas Box[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com
  5. [5]waferpedia.comwaferpedia.com